@article{Rong-2016-SM,
	doi = {10.1016/j.spmi.2016.02.050},
	year = {2016},
	volume = {93},
	pages = {27-31},
	author = {Xin Rong and Xinqiang Wang and Guang Chen and Jianhai Pan and Ping Wang and Huapeng Liu and Fujun Xu and Pingheng Tan and Bo Shen},
	title = {Residual stress in {A}l{N} films grownon sapphire substrates by molecular beam epitaxy},
	journal = {Superlattices and Microstructures}
}